Overview of Polymer based MEMS sensors

T. Sripriya*, V. Jeyalakshmi**
* Research Scholar, Department of Electronics and Communication Engineering, Sathyabama University.
** Professor, Department of Electronics and Communication Engineering, College of Engineering, Chennai.
Periodicity:December - February'2015
DOI : https://doi.org/10.26634/jele.5.2.3332


The objective of this paper is to present an overview of polymer based sensors, and technologies used for their fabrication. In this paper, the design and fabrication of shear stress sensor, silicon based micro sensor, gas sensor, pressure sensor, polymer filled sensor and Quartz sensor are discussed. Sensors are used to detect and measure a physical property. They indicate the value being measured and are also capable of providing a proper response to any change in the measured physical value. Example of commonly used sensors include Pressure Sensor, Temperature Sensor, Gas Sensor, Humidity Sensor, etc., Microelectromechanical System based sensors are miniaturized in size and their sensing is more accurate and they have a long life.


Sensors, Microelectromechanical System.

How to Cite this Article?

Sripriya, T. and Jeyalakshmi, V. (2015). Overview of Polymer based MEMS sensors. i-manager's Journal on Electronics Engineering, 5(2), 1-6. https://doi.org/10.26634/jele.5.2.3332


[1]. Fan-Gang Tseng and Chun-Jun Lin, (2003). “Polymer MEMS-Based Fabry–Perot Shear Stress Sensor”, IEEE Sensor Journal, Vol. 3, No. 6, pp. 812-817.
[2]. Christoph Friese et al., (2003). “Polymer Based Membrane Mirrors for Micro Optical Sensor”, IEEE.
[3]. Carmen A.M.Fung Et Al., (2005). “A PMMA – Based Micro Pressure Sensor Chip Using Carbon Nanotubes as th Sensing Elements”, IEEE, 18 International Conference on Micro Electro-Mechanical System, pp. 251-254.
[4]. Carmen K.M.Fung Et Al., (2005). “Fabrication of CNTBased MEMS Piezoresistive Pressure Sensors using DEP Nanoassembly”, IEEE Conference on Nanotechnology, Vol. 1, pp. 199-202.
[5]. Volker Schulz Et Al., (2013). “A Closed-Loop Hydrogel- Based Chemical Sensor”, IEEE Sensors Journal, Vol. 13, No. 3, pp. 994-1002.
[6]. Stephan Trautweiler and Nicholas Mosier., “New Silicon-Based Metal-Oxide Chemical Sensors ”, Microchemical System Publication.
[7]. Hsan-Yin Hsu et al., (2010). “Thermo Sensitive Microgels as in situ sensor for Temperature Measurement in Optoelectronic Tweezers”, IEEE, Micro Electro- Mechanical System, pp. 1123-1126.
[8]. R.Buchner et al., (2006). “Miniaturized Thermal Flow Sensors for Rough Environments”, IEEE MEMS, pp.582-585.
[9]. Sang-Soo Je et al., (2011). “A Thin Film Piezoelectric PVDF-TrFE Based Implantable Pressure Sensor Using Lithographic Patterning”, IEEE MEMS, pp. 644-647.
[10]. Lily L.Li et al., (2014). “Noise Squeezing Controlled Parametric Bifurcation Tracking of MIP-Coated Microbeam MEMS Sensor for TNT Explosive Gas Sensing”, Journal of Microelectromechanical Systems, pp. 1228- 1236.

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