i-manager Publications

Mems Fabrication Materials and Techniques for Emerging Trends

Boggadi Nagarjuna Reddy*, Venkatramana Reddy B. D. **

*-** Viswam Engineering College, Madanapalle, Annamayya district, Andhra Pradesh, India.

Periodicity:April - June'2025

Abstract

This paper explores how the selection of materials affects the operation of microelectromechanical systems (MEMS), with a particular emphasis on ceramics, carbon-based materials, silicon, silicon-based materials, and polymers. Different material types offer unique benefits, affecting both performance and cost. The formulation of ingredients, analogous to a chemical composition in a recipe, significantly influences the performance of MEMS devices, thereby underscoring the potential for innovation across various technological disciplines.

Keywords

MEMS, Fabrication Materials, Microfabrication Techniques, Emerging Trends, Nanostructured Materials.

How to Cite this Article?

Reddy, B. N., and Reddy, B. D. V. (2025). Mems Fabrication Materials and Techniques for Emerging Trends. i-manager’s Journal on Material Science, 13(1), 59-66.

References

[1]. Ando, T., & Fu, X. A. (2019). Materials: Silicon and beyond. Sensors and Actuators A: Physical, 296, 340-351.

[2]. Arnold, D. P., & Wang, N. (2009). Permanent magnets for MEMS. Journal of Microelectromechanical Systems, 18(6), 1255-1266.

[3]. Auciello, O., Birrell, J., Carlisle, J. A., Gerbi, J. E., Xiao, X., Peng, B., & Espinosa, H. D. (2004). Materials science and fabrication processes for a new MEMS technology based onultrananocrystalline diamond thin films. Journal of Physics: Condensed Matter, 16(16), R539.

[4]. Bogue, R. (2016). Non-silicon MEMS–the hard and soft alternatives. Sensor Review, 36(3), 225-230.

[5]. Cimalla, V., Pezoldt, J., & Ambacher, O. (2007). Group III nitride and SiC based MEMS and NEMS: Materials properties, technology and applications. Journal of Physics D: Applied Physics, 40(20), S19.

[6]. Cui, Z. (2004). Development of microfabrication technology for MEMS/ MOEMS applications. In MEMS/MOEMS Technologies and Applications II, 5641, 179-187. SPIE.

[7]. Esashi, M. (2009). Micro/nano electro mechanical systems for practical applications. In Journal of Physics: Conference Series, 187 (1), 012001. IOP Publishing.

[8]. Greiner, F., Quednau, S., Dassinger, F., Sarwar, R., Schlaak, H. F., Guttmann, M., & Meyer, P. (2013). Fabrication techniques for multiscale 3D-MEMS with vertical metal micro-and nanowire integration. Journal of Micromechanics and Microengineering, 23(2), 025018.

[9]. Hanemann, T., Boehm, J., Henzi, P., Honnef, K., Litfin, K., Ritzhaupt-Kleissl, E., & Hausselt, J. (2004). From micro to nano: Properties and potential applications of micro- and nano-filled polymer ceramic composites in microsystem technology. In IEE Proceedings- Nanobiotechnology, 151 (4), 167-172. IEE.

[10]. Jiang, S., Shi, T., Zhan, X., Xi, S., Long, H., Gong, B., & Tang, Z. (2015). Scalable fabrication of carbon-based MEMS/NEMS and their applications: A review. Journal of Micromechanics and Microengineering, 25(11), 113001.

[11]. Johari, S., Mazalan, M., Sridaran, Y., & Ahmad, S. R. (2015). Characterization of MEMS materials using laser micromachine. Applied Mechanics and Materials, 754, 612-616.

[12]. Kim, B. J., & Meng, E. (2015). Review of polymer MEMS micromachining. Journal of Micromechanics and Microengineering, 26(1), 013001.

[13]. Krogstad, J. A., Keimel, C., & Hemker, K. J. (2014). Emerging materials for microelectromechanical systems at elevated temperatures. Journal of Materials Research, 29(15), 1597-1608.

[14]. Liao, M., & Koide, Y. (2011). Carbon-based materials: growth, properties, MEMS/NEMS technologies, and MEM/NEM switches. Critical Reviews in Solid State and Materials Sciences, 36(2), 66-101.

[15]. Liu, C. (2007). Recent developments in polymer MEMS. Advanced Materials, 19(22), 3783-3790.

[16]. Nia, E. F., & Kouki, A. (2024). Ceramics for microelectromechanical systems applications: A review. Micromachines, 15(10), 1244.

[17]. Obuh, I. E. (2018). Low-Cost Fabrication Techniques for RF Microelectromechanical systems (MEMS) Switches and Varactors (Doctoral dissertation, University of Leeds).

[18]. Rathaur, A. S., Katiyar, J. K., & Patel, V. K. (2020). Tribo- mechanical Aspects in Micro-electro Mechanical Systems (MEMS). Tribology in Materials and Applications (pp. 243-259).

[19]. Saipriya, L., Deekshitha, A., Shreya, S., Verma, S., Swathi, C., & Manjunatha, C. (2022). Advances in graphene based MEMS and nems devices: Materials, fabrication, and applications. ECS Transactions, 107(1), 10997.

[20]. Schulz, M. (2009). Polymer derived ceramics in MEMS/NEMS–a review on production processes and application. Advances in Applied Ceramics, 108(8), 454- 460.

[21]. Torkashvand, Z., Shayeganfar, F., & Ramazani, A. (2024). Nanomaterials based micro/nanoelectromechanical system (MEMS and NEMS) devices. Micromachines, 15(2), 175.

[22]. Wilson, S. A., Jourdain, R. P., Zhang, Q., Dorey, R. A., Bowen, C. R., Willander, M., & Persson, K. (2007). New materials for micro-scale sensors and actuators: An engineering review. Materials Science and Engineering: R: Reports, 56(1-6), 1-129.

Mems Fabrication Materials and Techniques for Emerging Trends

Abstract

Keywords

How to Cite this Article?

References

If you have access to this article please login to view the article or kindly login to purchase the article

Purchase Instant Access

Options for accessing this content:

	North Americas,UK, Middle East,Europe		India	Rest of world
	USD	EUR	INR	USD-ROW
Pdf	35	35	200	20
Online	15	15	200	15
Pdf & Online	35	35	400	25