This paper deals with MEMS cantilever biosensor which functions as a piezoresistive sensor to detect tuberculosis. This piezoresistive sensor is based on measuring the change in resistance of the piezoresistive material due to the mechanical vibration of a cantilever beam. Cantilever surface is coated with antibody specific to TB antigen 85 complex. Patient blood sample is introduced on the cantilever if TB antigen is present in the blood sample that antigen binds with the antibody causing strain on the cantilever. The applied strain causes changes in the resistance of the piezoresistive material enabling the measurement of input variable. Here the strain is due antigen antibody binding on the cantilever surface. Bending of the cantilever due to the strain indicates the presence of the disease. The deflection of the microcantilever would be measured in terms of piezoresistive changes by implanting boron at the anchor point.
">This paper deals with MEMS cantilever biosensor which functions as a piezoresistive sensor to detect tuberculosis. This piezoresistive sensor is based on measuring the change in resistance of the piezoresistive material due to the mechanical vibration of a cantilever beam. Cantilever surface is coated with antibody specific to TB antigen 85 complex. Patient blood sample is introduced on the cantilever if TB antigen is present in the blood sample that antigen binds with the antibody causing strain on the cantilever. The applied strain causes changes in the resistance of the piezoresistive material enabling the measurement of input variable. Here the strain is due antigen antibody binding on the cantilever surface. Bending of the cantilever due to the strain indicates the presence of the disease. The deflection of the microcantilever would be measured in terms of piezoresistive changes by implanting boron at the anchor point.