i-manager Publications

A Comparative Study on Different Structures of PWM based MEMS Pressure Sensor

K. Sivasundari*

Department of Electronics and Instrumentation, Annamalai University, Chidambaram, Tamil Nadu, India.

Periodicity:July - December'2021
DOI : https://doi.org/10.26634/jic.9.2.16815

Abstract

Pressure measurement is critical in many process industries. For commercial purposes, industry uses a variety of pressure sensors for measurement, including sensors based on Micro Electro-Mechanical Systems (MEMS) technology. In this paper, a comparative study with two different Pulse-Width Modulation (PWM) based MEMS pressure sensor has been made. A similar study was made on a sensor with parallel plate mechanical switch and a cantilever based mechanical switch. The result shows that a better mechanical stability can be achieved by the parallel plate structure and better stability is achieved with cantilever structure.

Keywords

PWM, MEMS, Pressure Sensor, Cantilever Beam, Diaphragm, CoventorWare.

How to Cite this Article?

Sivasundari, K. (2021). A Comparative Study on Different Structures of PWM Based MEMS Pressure Sensor. i-manager's Journal on Instrumentation and Control Engineering, 9(2), 24-27. https://doi.org/10.26634/jic.9.2.16815

References

[1]. Belavič, D., Santo Zarnik, M., Hrovat, M., Makarovič, K., Kocjan, S., Hodnik, M., ... & Holc, J. (2011, September). LTCC-based capacitive pressure sensor in a harsh environment. In 18th European Microelectronics & Packaging Conference (pp. 1-4). IEEE.

[2]. Brox, D., Mohammadi, A. R., & Takahata, K. (2011). Non-lithographically microfabricated capacitive pressure sensor for biomedical applications. Electronics Letters, 47(18), 1015-1017.

[3]. Chiang, C. F., Graham, A. B., Messana, M. W., Provine, J., Buchman, D. T., O'Brien, G. J., & Kenny, T. W. (2011, June). Capacitive absolute pressure sensor with independent electrode and membrane sizes for improved fractional capacitance change. In 2011, 16th International Solid-State Sensors, Actuators and Microsystems Conference (pp. 894-897). IEEE.

[4]. Eswaran, P., & Malarvizhi, S. (2012). Design analysis of MEMS capacitive differential pressure sensor for aircraft altimeter. International Journal of Applied Physics and Mathematics, 2(1), 14-20.

[5]. Ho, S. S., Rajgopal, S., & Mehregany, M. (2010, January). Stainless steel capacitive pressure sensor for high pressure and corrosive media applications. In 2010, IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 647-650). IEEE.

[6]. Marghescu, C., Ionescu, C., Svasta, P., Santo Zarnik, M., & Belavič, D. (2010, May). FE modeling of capacitive pressure sensors realized in LTCC technology. In 33rd International Spring Seminar on Electronics Technology, ISSE 2010 (pp. 350-353). IEEE.

[7]. Sivasundari, K., Daniel, R. J., & Sumangala, K. (2017). Evolution, modelling and simulation of MEMS PWM pressure sensor employing cantilever switch and SOI diaphragm. Microsystem Technologies, 23(8), 3559-3574.

[8]. Sivasundari, K., Sugantharathnam, D. M., & Daniel, R. J. (2019). Fabrication of surface micromachined molybdenum cantilever beams for PWM MEMS pressure sensor and issues that affect yield. Microsystem Technologies, 25(7), 2535-2545.

[9]. Wheeler, J. W., Dabling, J. G., Chinn, D., Turner, T., Filatov, A., Anderson, L., & Rohrer, B. (2011, August). MEMS-based bubble pressure sensor for prosthetic socket interface pressure measurement. In 2011, Annual International Conference of the IEEE Engineering in Medicine and Biology Society (pp. 2925-2928). IEEE.

[10]. Ya, M. L., Khan, S., Nordin, A. N., Al-Khateeb, K. A., Islam, M. R., & Naji, A. W. (2011, May). Novel MEMS fully differential capacitive transducer design and analysis. In 2011, 4th International Conference on Mechatronics (ICOM) (pp. 1-4). IEEE.

	North Americas,UK, Middle East,Europe		India	Rest of world
	USD	EUR	INR	USD-ROW
Online	200	35	35	200	15
Pdf	35	35	200	20
Pdf & Online	35	35	400	25

A Comparative Study on Different Structures of PWM based MEMS Pressure Sensor

Abstract

Keywords

How to Cite this Article?

References

If you have access to this article please login to view the article or kindly login to purchase the article

Purchase Instant Access

Options for accessing this content: