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A Comparative Study on Different Structures of PWM based MEMS Pressure Sensor

K. Sivasundari*

Department of Electronics and Instrumentation, Annamalai University, Chidambaram, Tamil Nadu, India.

Periodicity:July - December'2021
DOI : https://doi.org/10.26634/jic.9.2.16815

Abstract

Pressure measurement is critical in many process industries. For commercial purposes, industry uses a variety of pressure sensors for measurement, including sensors based on Micro Electro-Mechanical Systems (MEMS) technology. In this paper, a comparative study with two different Pulse-Width Modulation (PWM) based MEMS pressure sensor has been made. A similar study was made on a sensor with parallel plate mechanical switch and a cantilever based mechanical switch. The result shows that a better mechanical stability can be achieved by the parallel plate structure and better stability is achieved with cantilever structure.

Keywords

PWM, MEMS, Pressure Sensor, Cantilever Beam, Diaphragm, CoventorWare.

How to Cite this Article?

Sivasundari, K. (2021). A Comparative Study on Different Structures of PWM Based MEMS Pressure Sensor. i-manager's Journal on Instrumentation and Control Engineering, 9(2), 24-27. https://doi.org/10.26634/jic.9.2.16815

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