Owing to the demand of the electricity consumption across the world, an important trait has been brought to the context by including the solar energy as an alternate source of power generation. The solar energy is termed as the best renewable resource that meets all the needs because of it tremendous benefit. Renewable energy generation can assist countries encounter their sustainable development that aims through delivery of spotless, safe, reliable and inexpensive energy. This paper gives the idea of using the on multiple criteria's decisions and methodology to find optimum sites for planting the solar power park concentrating on numerous other factors. Determining an apposite location that is favourable to all the circumstances such as the economy, environmental and social issues is a tedious task. Hence, considering the problem in account the best solution can be given as using the Geographical Information System (GIS) based model for this analysis. Here, the GIS-based model works with the multi-criteria-analysis for solar site assessment for Thiruvannamalai District, Tamil Nadu. The criteria such as distance from road, availability of barren lands, distance from waterbodies, slope, direction of sun radiation and existing built-up area etc. have been taken into consideration as analysis criteria. The study area extends between 78.20 to 79.50 eastern longitude and 11.55 to 13.15 northern latitude, and covers area of 622059 ha. At last number of maps was prepared to show the selected criteria's and a final output of the selected area which is very much suitable, moderately suitable and less suitable area to plant the solar power park.