References
[1]. Chen, W., Zhou, Q., Wan, F., & Gao, T. (2012). Gas sensing properties and mechanism of nano-SnO2-based sensor for hydrogen and carbon monoxide. Journal of Nanomaterials, 2012, 1.
[2]. Chung, W. Y., Lim, J. W., Lee, D. D., Miura, N., & Yamazoe, N. (2000). Thermal and gas-sensing properties of planar-type micro gas sensor. Sensors and Actuators B: Chemical, 64(1), 118-123.
[3]. Chwieroth, B., Patton, B. R., & Wang, Y. (2001). Conduction and Gas–Surface Reaction Modeling in Metal Oxide Gas Sensors. Journal of Electroceramics, 6(1), 27-41.
[4]. Courbat, J., Canonica, M. D., Briand, D., de Rooij, N. F., Teyssieux, D., Thiery, L., et al. (2008, October). Thermal simulation and characterization for the design of ultra-low power micro-hotplates on flexible substrate. In Sensors, 2008 IEEE (pp. 74-77). IEEE.
[5]. Faleh, R., Othman, M., Gomri, S., Aguir, K., & Kachouri, A. (2016). A transient signal extraction method of WO3 gas sensors array to identify polluant gases. IEEE Sensors Journal, 16(9), 3123-3130.
[6]. Iwaki, T., Covington, J. A., Gardner, J. W., Udrea, F., Blackman, C. S., & Parkin, I. P. (2006, October). SQI-CMOS based single crystal silicon micro-heaters for gas sensors. In Sensors, 2006. 5th IEEE Conference on (pp. 460-463). IEEE.
[7]. Kathirvelan, J., Vijayaraghavan, R. (2014). Design, Simulation and Analysis of Platinum Microheater on substrate for sensor applications, ARPAN Journal of Engineering and Applied Sciences, 9, 2307-2314.
[8]. Kumar, H., Singh, K. K., Sood, N., Kumar, A., & Mittal, R. K. (2014, February). Design and simulation of a Micro Hotplate for MEMS based integrated gas sensing system. In Sensors Applications Symposium (SAS), 2014 IEEE (pp. 181-184). IEEE.
[9]. Lee, D. S., Han, S. D., Huh, J. S., & Lee, D. D. (1999). Nitrogen oxides-sensing characteristics of WO3 -based nanocrystalline thick film gas sensor. Sensors and Actuators B: Chemical, 60(1), 57-63.
[10]. Liu, X., Cheng, S., Liu, H., Hu, S., Zhang, D., & Ning, H. (2012). A survey on gas sensing technology. Sensors, 12(7), 9635-9665.
[11]. Maluf, N., & Williams, K. (2004). Introduction to Microelectromechanical Systems Engineering. Artech House.
[12]. Miorandi, D., Sicari, S., De Pellegrini, F., & Chlamtac, I. (2012). Internet of things: Vision, applications and research challenges. Ad Hoc Networks, 10(7), 1497-1516.
[13]. Naumann, F., Ebert, M., Hildenbrand, J., Moretton, E., Peter, C., & Wollenstein, J. (2009, April). Thermal and mechanical design optimisation of a micro machined mid-infrared emitter for optical gas sensing systems. In Thermal, Mechanical and Multi-Physics simulation and Experiments in Microelectronics and Microsystems, 2009. EuroSimE 2009. 10th International Conference on (pp. 1-5). IEEE.
[14]. Prasad, M., & Khanna, V. K. (2015). A low-power, micromachined, double spiral hotplate for MEMS gas sensors. Microsystem Technologies, 21 (10), 2123-2131.
[15]. Prasad, M., Yadav, R. P., Sahula, V., & Khanna, V. K. (2011). Design and simulation of Pt-based microhotplate, and fabrication of suspended dielectric membrane by bulk micromachining. In 16th International Workshop on Physics of Semiconductor Devices (Vol. 8549, p. 85491C). International Society for Optics and Photonics.
[16]. Rossi, C., Temple-Boyer, P., & Estève, D. (1998). Realization and per formance of thin SiO2/SiNx membrane for microheater applications. Sensors and Actuators A: Physical, 64(3), 241-245.
[17]. Saxena, G., & Paily, R. (2012, December). Simulation study of power loss components in a microheater. In Power and Energy in NERIST (ICPEN), 2012 1st International Conference on (pp. 1-5). IEEE.
[18]. Saxena, G., & Paily, R. (2013, June). Effect of membrane to heater ratio on the performance of square microhotplate. In Emerging Research Areas and 2013 International Conference on Microelectronics, Communication sand Renewable Energy (AICERA/ICMiCR), 2013 Annual International Conference on (pp. 1-5). IEEE.
[19]. Saxena, G., & Paily, R. (2015). Choice of insulation materials and its effect on the performance of square microhotplate. Microsystem Technologies, 21(2), 393- 399.
[20]. Singh, A. V. (2015). Fabrication of a Micro-hotplate for Application as an Infrared Emitter (Doctoral Dissertation, Carleton University Ottawa).
[21]. Xu, L., Li, T., Gao, X., & Wang, Y. (2011). Development of a reliable micro-hotplate with low power consumption. IEEE Sensors Journal, 11(4), 913-919.