Overview of Polymer based MEMS sensors

T. Sripriya*, V. Jeyalakshmi**
* Research Scholar, Department of Electronics and Communication Engineering, Sathyabama University.
** Professor, Department of Electronics and Communication Engineering, College of Engineering, Chennai.
Periodicity:December - February'2015
DOI : https://doi.org/10.26634/jele.5.2.3332

Abstract

The objective of this paper is to present an overview of polymer based sensors, and technologies used for their fabrication. In this paper, the design and fabrication of shear stress sensor, silicon based micro sensor, gas sensor, pressure sensor, polymer filled sensor and Quartz sensor are discussed. Sensors are used to detect and measure a physical property. They indicate the value being measured and are also capable of providing a proper response to any change in the measured physical value. Example of commonly used sensors include Pressure Sensor, Temperature Sensor, Gas Sensor, Humidity Sensor, etc., Microelectromechanical System based sensors are miniaturized in size and their sensing is more accurate and they have a long life.

Keywords

Sensors, Microelectromechanical System.

How to Cite this Article?

Sripriya, T. and Jeyalakshmi, V. (2015). Overview of Polymer based MEMS sensors. i-manager's Journal on Electronics Engineering, 5(2), 1-6. https://doi.org/10.26634/jele.5.2.3332

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