The advancement in sophisticated technology led to the development of sensors that are helping humans in each and every walk of their life. With the availability of surface mount technology techniques in semiconductor manufacturing systems, many miniaturized devices are currently being produced that are used in sensing parameters like temperature, pressure, level, flow, velocity, thickness, etc. They are designed in such a way that they can even withstand harsh environments and cryogenic conditions with an added advantage of being passive in nature. These devices can be applied to versatile industries, but whereas in medical segment, their significance of impact is more due to wide variety of challenges yet to be answered by conventionally available sensing techniques. As wireless techniques involve signal distortion, transmission problems, and data losses, currently available micro sensors are up to the benchmark, that are able to meet the industry standards by overcoming the general issues in wave propagation.
This paper is a mainly focused medical domain on scanning with MEMS based devices. As imaging of internal body parts in human is most important task involved in medical domain as it helps to identify damaged area, amount of infection, breakage in bones, clots in blood, disease monitoring, clinical diagnostics, etc. Here, a micromirror is used that moves thousands of times per second to generate an invisible grid and that is finally analysed in 3D for imaging. In this model, the dynamic vibrating behaviour of the solid mirror is analysed with air surrounding it using shell elements. The model is solved both for frequency-domain sweep and Eigen frequency study using COMSOL Multiphysics software. The displacement (or velocity) is evaluated at the tip of the mirror for the frequency sweep. This paper focuses on simulation and analysis of micromirror and its corresponding displacement response in terms of torquing force. Current challenges and future scope of micro-electro-mechanical-systems based wireless Micromirror imaging sensor for different medical applications are discussed. This sensor is used for various scanning, fibre optics microscopy applications, and in 3D tissue analysis and for various optical engineering applications.
