JME_V3_N3_RP1 Tarlochan Singh Apurbba Kumar Sharma Akshay Dvivedi Journal on Mechanical Engineering 2249 - 0744 3 3 1 7 Micro Channel, Micro Ultrasonic Machining, Process Parameters, RSM Micro ultrasonic machining is being explored of late as a mechanical micromachining method to fabricate micro channels on hard and brittle materials. A significant advantage of the process is that the process can be used to machine materials irrespective of their electrical conducting unlike many other popular micro fabrication processes. In the present paper, influences of process parameters were investigated while fabricating microchannels on silicon wafers. Response Surface Methodology (RSM) approach was used to analyze the results. Abrasive mesh size, static load, slurry concentration and power rating were considered as input process parameters while surface roughness and Material Removal Rate (MRR) were considered as process responses. The response curves illustrating the individual effect and also the combined effect of process parameters have been presented. May - July 2013 Copyright © 2013 i-manager publications. All rights reserved. i-manager Publications http://www.imanagerpublications.com/Article.aspx?ArticleId=2365