JFET_V4_N2_A3 P. Somasundaram S. Chandika C. Jegadheesan Journal on Future Engineering and Technology 2230 – 7184 4 2 22 26 Piezo, Electro Mechanical System, Micro Pump Nowadays researchers are focussing on compact system design for all engineering applications without sacrificing the system performance. This paper deals with the importance of micro electro mechanical systems and its usage in day-today life. One such mechanical component is mechanical pump, which is used in various sectors of industrial, household and medical systems. This work is concentrated on Piezo-driven valve-less micro pump, which does not have check valves. The fluid flow direction is controlled by converging and diverging nozzles. Thermo Electro Mechanical Analysis is done to evaluate mechanical (stress, force, pressure, acceleration, piezoelectric), thermal (temperature, convection, heat flux, resistive heatingincluding variable resistors and Piezo resistors) and Electrical (capacitive forces defined by voltages) properties. November 2008 - January 2009 Copyright © 2009 i-manager publications. All rights reserved. i-manager Publications http://www.imanagerpublications.com/Article.aspx?ArticleId=512