JFET_V2_N2_RP7 A.K. Ahmad F.A. Ali S.M. Juma Journal on Future Engineering and Technology 2230 – 7184 2 2 87 93 smart system, expert system, focused ion beam, software engineering A computer aided design (CAD) using optimization methods for the ion optical system has been developed, by mixing the dynamic programming procedure and artificial intelligence technique. CADION ANALYZER has been designed as an expert system, written in Java expert system shell(JESS 6.1) and Visual Basic 6 (VB6) for optimizing and analyzing full calculation processes. By using this rule based engine, the optimized axial potential distributions for electrostatic fields under imposed constraints have been used in the optical column setup. Spot size measurements were calculated in nano scales, which have values closed to (3.0) nm applicable in nano technology applications. November 2006 - January 2007 Copyright © 2007 i-manager publications. All rights reserved. i-manager Publications http://www.imanagerpublications.com/Article.aspx?ArticleId=893