JES_V4_N2_RP3 A.M. Shriram K.R. Deepak Journal on Embedded Systems 2278 - 7895 4 2 13 16 MEMS, LithiumBattery , SolarCells The paper describes about MEMS based Robot which is a kind of robot that can be controlled by our handmovements rather than ordinary old switches and keypad. Already, conventional system performs its task with the help of lithium battery but in this concept, battery backup ismade with optimal concept. The charging concept in the existing systemis overcome with help of solar cells in this project. Micro-Electro- Mechanical Systems consists of mechanical elements, sensors, actuators, and electrical and electronics devices on a common silicon substrate. The sensors in MEMS gather information from the environment through measuring mechanical, thermal, biological, chemical, optical, and magnetic Substance. May - July 2015 Copyright © 2015 i-manager publications. All rights reserved. i-manager Publications http://www.imanagerpublications.com/Article.aspx?ArticleId=4835