JELE_V5_N2_A1 T. Sripriya V. Jeyalakshmi Journal on Electronics Engineering 2249 – 0760 5 2 1 6 Sensors, Microelectromechanical System The objective of this paper is to present an overview of polymer based sensors, and technologies used for their fabrication. In this paper, the design and fabrication of shear stress sensor, silicon based micro sensor, gas sensor, pressure sensor, polymer filled sensor and Quartz sensor are discussed. Sensors are used to detect and measure a physical property. They indicate the value being measured and are also capable of providing a proper response to any change in the measured physical value. Example of commonly used sensors include Pressure Sensor, Temperature Sensor, Gas Sensor, Humidity Sensor, etc., Microelectromechanical System based sensors are miniaturized in size and their sensing is more accurate and they have a long life. December 2014 - February 2015 Copyright © 2015 i-manager publications. All rights reserved. i-manager Publications http://www.imanagerpublications.com/Article.aspx?ArticleId=3332