JELE_V2_N4_RP1 Sheilza Jain Maneesha Garg A.Swarup Journal on Electronics Engineering 2249 – 0760 2 4 1 7 Nanotechnology, Nanopositioning, Piezoelectric Actuator, Internal Model Control Nanopositioning, the precise control and manipulation of devices and materials at nanoscale, plays an important role in all applications of nanotechnology. Nanopositioners are designed to move objects over a small range with a resolution down to a fraction of an atomic diameter. The primary objectives of nanopositioners include fast response with very little or no overshoot, large travel range, very high resolution, extremely high precision and high bandwidth. Performance characteristics of the system can be improved by the use of feedback controller. Complexity of controller depends upon model of the plant/process and objectives of the control system. The primary objectives of control system are to obtain fast and accurate set point tracking as well as efficient disturbances rejection. The Internal model control (IMC) structure is a suitable control system for satisfying these objectives. This paper presents the identification of nanopositioning device and analyzes its open loop behavior. The IMC scheme is implemented on non-minimum phase nanopositioning devices and is verified for set point changes and disturbance rejection. The proposed control scheme possesses good robustness against set point changes and disturbance rejection. In this paper, performance specifications of nanopositioning system with IMC structure are also compared with traditional PID controller tuning algorithms. Results simulated on MATLAB demonstrate its effectiveness and versatility for precise positioning. June – August 2012 Copyright © 2012 i-manager publications. All rights reserved. i-manager Publications http://www.imanagerpublications.com/Article.aspx?ArticleId=1896