JCS_V1_N4_RP3 Maflin Shaby Vimala Juliet Journal on Communication Engineering and Systems 2277-5242 1 4 19 23 MEMS, Pressure sensor, Diaphragm, Silicon Sensitivity, Linearity This paper presents a structural analysis of MEMS Pressure sensor. The diaphragm of the Pressure was made of silicon. Different diaphragm shape, pressure range, the positioning of resistors in the diaphragm and the length and width of the resistors were considered during the analysis. A simulation programs were developed to predict the sensitivity and linearity behavior of the piezoresistive pressure sensor. The output response of the pressure sensor was also found as a function of temperature and pressure. The analysis showed that sensitivity and linearity are influenced by diaphragm thickness and length of the sensing resistor. August - October 2012 Copyright © 2012 i-manager publications. All rights reserved. i-manager Publications http://www.imanagerpublications.com/ArticleHTML.aspx?articleID=1981