JCIR_V1_N2_RP4 Sumit Kumar Jindal S.K. Raghuwanshi Journal on Circuits And Systems 2322–035X 1 2 19 27 MEMS, Diaphragm, Stress, Piezo-resistor MEMS offer various fabrication process to fabricate diaphragms for various applications such as microphones, capacitive sensors, pressure sensor, micro-pumps etc. The working principle of all the devices is based on the force uniformly applied on the diaphragm and cause the diaphragm to deflect. The parameter optimization of the diaphragm is a challenge in order to achieve the best performance of the device. March - May 2013 Copyright © 2013 i-manager publications. All rights reserved. i-manager Publications http://www.imanagerpublications.com/Article.aspx?ArticleId=2291