A Complete Analytical Model for Circular Diaphragm Pressure Sensor with Clamped edge

Sumit Kumar Jindal*, S. K. Raghuwanshi**
* Research Scholar, Department of Electronics Engineering, Indian School of Mines, Dhanbad, Jharkhand, India.
** Assistant Professor, Department of Electronics Engineering, Indian School of Mines, Dhanbad, Jharkhand, India.
Periodicity:March - May'2013
DOI : https://doi.org/10.26634/jcir.1.2.2291

Abstract

MEMS offer various fabrication process to fabricate diaphragms for various applications such as microphones, capacitive sensors, pressure sensor, micro-pumps etc. The working principle of all the devices is based on the force uniformly applied on the diaphragm and cause the diaphragm to deflect. The parameter optimization of the diaphragm is a challenge in order to achieve the best performance of the device.

Keywords

MEMS, Diaphragm, Stress, Piezo-resistor

How to Cite this Article?

Jindal, S. K. and Raghuwanshi, S. K. (2013). A Complete Analytical Model For Circular Diaphragm Pressure Sensor With Clamped Edge. i-manager’s Journal on Circuits and Systems, 1(2), 19-27. https://doi.org/10.26634/jcir.1.2.2291

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